Title:
NOZZLE AND LIQUID INJECTION DEVICE
Document Type and Number:
WIPO Patent Application WO/2021/014610
Kind Code:
A1
Abstract:
A nozzle (20) is a component that has a channel (21) in which a liquid flows and that delivers the liquid toward an object (W) to be treated, said channel (21) comprising an oscillation generation channel (22) for generating an oscillating flow in the liquid.
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Inventors:
AKENAGA HIROKI (JP)
NAKAMORI KENTA (JP)
SAKAI FUMIYA (JP)
NAKAMORI KENTA (JP)
SAKAI FUMIYA (JP)
Application Number:
PCT/JP2019/029014
Publication Date:
January 28, 2021
Filing Date:
July 24, 2019
Export Citation:
Assignee:
ASAHI SUNAC CORP (JP)
International Classes:
B05B1/34; B08B3/02; B08B3/10; B08B3/12; H01L21/304
Foreign References:
| JP2005205397A | 2005-08-04 | |||
| EP1306136A1 | 2003-05-02 | |||
| JP2001044602A | 2001-02-16 | |||
| JP2010129840A | 2010-06-10 | |||
| JP2008536671A | 2008-09-11 | |||
| CN102941172A | 2013-02-27 | |||
| JPS56141860A | 1981-11-05 | |||
| JPH0647672A | 1994-02-22 |
Attorney, Agent or Firm:
AKATSUKI UNION PATENT FIRM (JP)
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