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Title:
OLEFIN-TRIGGERED ACID AMPLIFIERS
Document Type and Number:
WIPO Patent Application WO/2012/135278
Kind Code:
A3
Abstract:
There are disclosed olefinic acid amplifier triggers and methods of using these compositions in, for example, photolithography.

Inventors:
CARDINEAU BRIAN (US)
BRAINARD ROBERT L (US)
Application Number:
PCT/US2012/030840
Publication Date:
January 03, 2013
Filing Date:
March 28, 2012
Export Citation:
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Assignee:
UNIV NEW YORK STATE RES FOUND (US)
CARDINEAU BRIAN (US)
BRAINARD ROBERT L (US)
International Classes:
C07C309/63; C09K3/00; G03F7/004; H01L21/027
Foreign References:
US20070255055A12007-11-01
US20080287414A12008-11-20
US20080227032A12008-09-18
Other References:
NUNEZ, ANA ET AL.: "Ring-Closing Metathesis Reactions on Azinium Salts: Straightforward Access to Quinolizinium Cations and Their Dihydro Derivatives", J. ORG. CHEM., vol. 74, 2009, pages 4166 - 4176
HANESSIAN, STEPHEN ET AL.: "Synthetic Studies in the Intramolecular Carbocyclization of N-Acyloxyiminium Ions. Stereoelectronic and Steric Implications of Nucleophilic Alkene, Alkyne, and Allene Tethers", J. ORG. CHEM., vol. 70, 2005, pages 5070 - 5085
WANG, JIN ET AL.: "Vinyl Diazophosphonates as Precursors to Quaternary Substituted Indolines and Cyclopentenes", ORGANIC LETTERS, vol. 13, 14 January 2011 (2011-01-14), pages 700 - 702
COEFFARD, VINCENT ET AL.: "Mild electrochemical deprotection of N-phenylsulfonyl N-substituted amines derived from (R)-phenylglycinol", EUR. J. ORG. CHEM., 2008, pages 383 - 391
RAGHAVAN, SADAGOPAN ET AL.: "Stereoselective synthesis of (-)-allosedamine and (1R,3R)-HPA-12 from beta-p-toluenesulfonamido-gamma,delta-unsaturated sulfoxide", TETRAHEDRON, vol. 60, 2004, pages 5059 - 5067
ASENSIO, GREGORIO ET AL.: "H-Bonding Interactions in the Epoxidation of Alkenylammonium Salts with Dimethyldioxirane and m-Chloroperbenzoic Acid: A Kinetic Study", J. ORG. CHEM., vol. 64, 1999, pages 4705 - 4711
Attorney, Agent or Firm:
FREDERICKS, Kellie S. (5 Columbia CircleAlbany, New York, US)
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