OPTICAL INNER SURFACE MEASUREMENT DEVICE

WIPO Patent Application WO/2018/011981

A1

[Problem] To perform high-precision measurement in an optical inner surface measurement device that observes and measures the inner circumferential surface of a thin nozzle hole which is an object to be measured. [Solution] The present invention is provided with: a rotation-side optical fiber that is rotated by a motor; and a fixed-side optical fiber that is not rotated relative to the rotation-side optical fiber, wherein the rotation-side optical fiber has an optical path conversion means at an end thereof, and an end surface of the rotation-side optical fiber and an end surface of the fixed-side optical fiber are opposed to each other, behind the motor, with a small space therebetween so that a rotary optical joint is configured. The present invention has a sway detection sensor that measures a sway amount of the rotation-side optical fiber. Reflection light from the inner circumferential surface of an object to be measured is taken by the optical path conversion means, is guided to a measurement machine body via the rotation-side optical fiber and the fixed-side optical fiber, and is analyzed by a computer, whereby inner surface measurement data is obtained. Further, a sway amount detected by the sway detection sensor is added to the inner surface measurement data, whereby high-precision measurement can be performed while the influence of rotational swaying and the influence of variation of an optical fluctuation are eliminated.

YAMAZAKI HIROSHI (JP)
TATEYAMA TAKUYA (JP)
NARITA KENJI (JP)
ASADA TAKAFUMI (JP)

PCT/JP2016/071012

January 18, 2018

July 15, 2016

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NAMIKI PRECISION JEWEL CO LTD (JP)

G01B11/24

WO2016084638A1

2016-06-02

JP2015008995A

2015-01-19

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