Title:
OXIDIZING FURNACE
Document Type and Number:
WIPO Patent Application WO/2019/233063
Kind Code:
A1
Abstract:
An oxidizing furnace, comprising: a furnace cavity (8), wherein the furnace cavity (8) comprises a process zone (A), a thermal insulation zone (B), a burning zone (C) and a heat preservation zone (D) from top to bottom; a process boat (9) arranged in the process zone (A) and used for bearing a workpiece to be processed; a gas inlet pipeline for transferring a process gas, wherein a gas outlet (121) of the gas inlet pipeline is located in the burning zone (C), and a gas inlet of the gas inlet pipeline extends out from the bottom of the furnace cavity (8); a thermal insulation structure (10) arranged in the thermal insulation zone (B), wherein the thermal insulation structure (10) enables the thermal insulation zone (B) to form a gas inlet channel so as to transfer the gas in the burning zone (C) to the process zone (A); and a heat preservation structure (14) arranged in the heat preservation zone (D) and surrounding the outer periphery of the gas inlet pipeline. The oxidizing furnace can save on equipment space, reduce equipment cost, and also improve the stability of airflow.
Inventors:
CHEN ZHIBING (CN)
LI XUGANG (CN)
LIU DONG (CN)
LI XUGANG (CN)
LIU DONG (CN)
Application Number:
PCT/CN2018/119549
Publication Date:
December 12, 2019
Filing Date:
December 06, 2018
Export Citation:
Assignee:
BEIJING NAURA MICROELECTRONICS EQUIPMENT CO LTD (CN)
International Classes:
F27B5/04; H01L21/67
Domestic Patent References:
| WO2018048300A2 | 2018-03-15 |
Foreign References:
| CN105470168A | 2016-04-06 | |||
| CN1470800A | 2004-01-28 | |||
| CN201081534Y | 2008-07-02 | |||
| EP0588479A1 | 1994-03-23 |
Attorney, Agent or Firm:
TEE & HOWE INTELLECTUAL PROPERTY ATTORNEYS (CN)
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