Title:
PELLICLE FILM, PELLICLE, EXPOSURE ORIGINAL PLATE, EXPOSURE DEVICE, AND METHOD FOR MANUFACTURING PELLICLE FILM
Document Type and Number:
WIPO Patent Application WO/2023/027159
Kind Code:
A1
Abstract:
This pellicle film contains a plurality of carbon nanotubes, wherein the plurality of carbon nanotubes have an average value of the linearity parameter represented by formula (1) of is 0.10 or lower. Formula (1): the linearity parameter = the standard deviation Sa of the widths of a single tube / the average value Aa of the widths. In formula (1), the single tube indicates one carbon nanotube included in the plurality of carbon nanotubes, and the standard deviation Sa and the average value Aa are each calculated on the basis of measurement values of 11 points obtained by measuring the width of the single tube for each 2 nm interval along the longitudinal direction of the single tube.
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Inventors:
ONO YOSUKE (JP)
Application Number:
PCT/JP2022/032111
Publication Date:
March 02, 2023
Filing Date:
August 25, 2022
Export Citation:
Assignee:
MITSUI CHEMICALS INC (JP)
International Classes:
B82Y30/00; B82Y40/00; C01B32/168; G03F1/62; G03F7/20
Domestic Patent References:
| WO2018008594A1 | 2018-01-11 | |||
| WO2018225863A1 | 2018-12-13 | |||
| WO2006011655A1 | 2006-02-02 |
Foreign References:
| JP2019168502A | 2019-10-03 | |||
| JP2021172528A | 2021-11-01 | |||
| JP2020181212A | 2020-11-05 | |||
| JP2021138015A | 2021-09-16 |
Other References:
SAITOETAL., J. NANOSCI. NANOTECHNOL., vol. 8, 2008, pages 6153 - 6157
Attorney, Agent or Firm:
TAIYO, NAKAJIMA & KATO (JP)
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