Title:
PHOTOCATALYST PURIFYING SYSTEM
Document Type and Number:
WIPO Patent Application WO/2004/050218
Kind Code:
A1
Abstract:
A photocatalyst purifying system characterized by being provided with a photocatalyst and a light emitting diode for purifying a local space or an enclosed space for machining, transporting and storing a substrate being machined in a micromachining process. The photocatalyst purifying system is characterized by being provided with a photocatalyst produced by forming a photocatalyst film on a substrate, a light emitting diode for irradiating the photocatalyst with UV−rays, a photocatalyst unit case provided with a power supply section, and a reflector. Furthermore, the photocatalyst purifying system is characterized by having a corrugated cross−sectional shape, and the light emitting diode is characterized by being aligned with the wave crest of the photocatalyst having corrugated cross−section.
Inventors:
ISHIKAWA TOSHIO (JP)
WADA TAKEO (JP)
SAKAI KAZUHIRO (JP)
WADA TAKEO (JP)
SAKAI KAZUHIRO (JP)
Application Number:
PCT/JP2002/012680
Publication Date:
June 17, 2004
Filing Date:
December 03, 2002
Export Citation:
Assignee:
DAINICHI SHOJI K K (JP)
HITACHI METALS LTD (JP)
TOYODA GOSEI KK (JP)
ISHIKAWA TOSHIO (JP)
WADA TAKEO (JP)
SAKAI KAZUHIRO (JP)
HITACHI METALS LTD (JP)
TOYODA GOSEI KK (JP)
ISHIKAWA TOSHIO (JP)
WADA TAKEO (JP)
SAKAI KAZUHIRO (JP)
International Classes:
B01D53/88; B01J35/00; H01L21/673; B01J37/02; (IPC1-7): B01D53/86; B01J35/02; H01L21/68; H01L21/02; B65D85/38
Foreign References:
| JP2001276654A | 2001-10-09 | |||
| JP2001009016A | 2001-01-16 | |||
| JP2001340441A | 2001-12-11 | |||
| JP2002211927A | 2002-07-31 | |||
| US5919422A | 1999-07-06 |
Attorney, Agent or Firm:
Kawawa, Takaho (Mita 3-chome Minato-ku, Tokyo, JP)
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