Title:
PHYSICAL PROPERTY EVALUATION DEVICE
Document Type and Number:
WIPO Patent Application WO/2020/031930
Kind Code:
A1
Abstract:
This invention prevents measurement error from becoming large in thermoelectric conversion coefficient evaluation and enhances evaluation efficiency. This invention is a physical property evaluation device for evaluating the physical properties of a plurality of solid materials formed on a substrate. The physical property evaluation device comprises an electromotive force measurement means that forms closed circuits including the individual solid materials and measures the electromotive forces occurring at the two ends of each of the solid materials, a means for producing heat flow within the individual solid materials, an external magnetic field generation means for generating a uniform magnetic field having a given intensity and direction in the vicinity of the individual solid materials, and an automation means for evaluating the physical properties of the individual solid materials using the electromotive force measurement means, heat flow production means, and external magnetic field generation means.
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Inventors:
ISHIDA MASAHIKO (JP)
SAWADA RYOHTO (JP)
IWASAKI YUMA (JP)
KIRIHARA AKIHIRO (JP)
SOMEYA HIROKO (JP)
SAWADA RYOHTO (JP)
IWASAKI YUMA (JP)
KIRIHARA AKIHIRO (JP)
SOMEYA HIROKO (JP)
Application Number:
PCT/JP2019/030628
Publication Date:
February 13, 2020
Filing Date:
August 05, 2019
Export Citation:
Assignee:
NEC CORP (JP)
International Classes:
G01N25/00; H01L29/82; H01L37/00
Domestic Patent References:
| WO2016136190A1 | 2016-09-01 |
Foreign References:
| JP2008170259A | 2008-07-24 | |||
| CN107328808A | 2017-11-07 | |||
| JP2017191066A | 2017-10-19 |
Attorney, Agent or Firm:
SHIMOSAKA Naoki (JP)
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