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Title:
PHYSICAL QUANTITY MEASUREMENT DEVICE
Document Type and Number:
WIPO Patent Application WO/2020/110742
Kind Code:
A1
Abstract:
Provided is a physical quantity measurement device capable of enhancing the measurement accuracy of a thermal airflow rate sensor compared to the prior art and preventing a hollow part on the back side of a diaphragm of the thermal airflow rate sensor from becoming sealed. The physical quantity measurement device 20 comprises a lead frame 208f having a mounting surface f1 upon which is mounted a flow rate sensor 205 that is a thermal airflow rate sensor, and a flow-path-forming member 209 disposed on a rear surface f2 of the lead frame 208f that is on the reverse side of the lead frame 208f from the mounting surface f1. A ventilation flow path 210 is formed from a first through hole 211 that is provided in the lead frame 208f and is in communication with a hollow part 205c of the flow rate sensor 205, a second through hole 212 that is provided in the lead frame 208f and opens to a mounting surface f1, and a connecting flow path 213 that is demarcated by the lead frame 208f and the flow-path-forming member 209 and connects the first through hole 211 and second through hole 212.

Inventors:
YOGO TAKAYUKI (JP)
FATIN FARHANAH BINTI HARIDAN (JP)
ABE HIROYUKI (JP)
IKEO SATOSHI (JP)
CHIBA YUTA (JP)
Application Number:
PCT/JP2019/044628
Publication Date:
June 04, 2020
Filing Date:
November 14, 2019
Export Citation:
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Assignee:
HITACHI AUTOMOTIVE SYSTEMS LTD (JP)
International Classes:
G01F1/684
Domestic Patent References:
WO2015033589A12015-03-12
WO2013084259A12013-06-13
Foreign References:
JP2015094647A2015-05-18
Attorney, Agent or Firm:
TODA Yuji (JP)
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