PIEZOELECTRIC ACTIVE VIBRATION ISOLATION MECHANISM AND METHOD OF REDUCING THE INHERENT FREQUENCY OF A VIBRATION SYSTEM THEREOF

Title:

PIEZOELECTRIC ACTIVE VIBRATION ISOLATION MECHANISM AND METHOD OF REDUCING THE INHERENT FREQUENCY OF A VIBRATION SYSTEM THEREOF

Document Type and Number:

WIPO Patent Application WO/2017/024904

Kind Code:

A1

Abstract:

A piezoelectric active vibration isolation mechanism comprises a first force sensor (23b), a spring bellows (27), a middle mass block (26), a first flexible hinge (22b), a piezoelectric actuator, a second force sensor (23a), a second flexible hinge (22a) and a controller, one end of the first force sensor (23b) being used for connecting a base platform (28), and the other end thereof being connected sequentially to the spring bellows (27), the middle mass block (26), the first flexible hinge (22b), the piezoelectric actuator, the second force sensor (23a) and the second flexible hinge (22a). The first force sensor (23b) and the second force sensor (23a) are respectively used for detecting vibration signals of the base platform (28) and of a loading platform (21), and respectively transmitting the detected vibration signals to the controller so that the controller controls the piezoelectric actuator to apply a force onto the loading platform (21), thereby compensating the loading platform (21). The piezoelectric active vibration isolation mechanism utilizes a two-stage series-connected suspension structure, effectively reducing the inherent frequency of the structure and being able to effectively suppress low-frequency interference of the slight vibration in a precision device. A method of reducing the inherent frequency of a vibration system is further disclosed.

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Inventors:

CHEN XUEDONG (CN)
TAO YEYING (CN)
LI XIAOQING (CN)
WANG MIN (CN)
MING PINGGUANG (CN)
LI MING (CN)

Application Number:

PCT/CN2016/087427

Publication Date:

February 16, 2017

Filing Date:

June 28, 2016

Export Citation:

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Assignee:

UNIV HUAZHONG SCIENCE TECH (CN)

International Classes:

F16F15/02; G05D19/02

Foreign References:

CN105134866A	2015-12-09
CN105094165A	2015-11-25
CN103587724A	2014-02-19
CN104265829A	2015-01-07
US20070024829A1	2007-02-01
EP1503246A2	2005-02-02

Attorney, Agent or Firm:

HUAZHONG UNIVERSITY OF SCIENCE AND TECHNOLOGY PATENT AGENCY CENTER (CN)

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