PIEZOELECTRIC ACTUATOR DEVICE AND METHOD FOR MANUFACTURING SAME

WIPO Patent Application WO/2013/114857

A1

This piezoelectric actuator device is provided with a vibrating part and a driving part configured so as to cause the vibrating part to vibrate. The vibrating part has a lower vibrating layer, which vibrates, and an upper vibrating layer, which is joined to the upper surface of the lower vibrating layer and which vibrates with the lower vibrating layer. The driving part has an upper electrode layer provided to the lower surface of the lower vibrating layer, a piezoelectric layer provided to the lower surface of the upper electrode layer, and a lower electrode layer provided to the lower surface of the piezoelectric layer. The principal component of the lower vibrating layer of the vibrating part is an organic material. The principal component of the upper vibrating layer of the vibrating part is an inorganic material. The longitudinal elastic modulus of the lower vibrating layer is smaller than the longitudinal elastic modulus of the upper vibrating layer. In this piezoelectric actuator device, the resistance against external vibration and the amount of deflection of the vibrating part can be increased without increasing the size or the power consumption.

HIRAOKA SOICHIRO
KOMAKI KAZUKI
NAKAZONO SHINSUKE
KUROZUKA AKIRA
HORIE TOSHIAKI

PCT/JP2013/000455

August 08, 2013

January 29, 2013

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PANASONIC CORP (JP)

H01L41/09; B06B1/06; G01C19/5607; G02B26/10; H01H57/00; H01L41/08; H01L41/18; H01L41/193; H01L41/22; H02N2/00

JP4835813B1	2011-12-14
JP2001024460A	2001-01-26
JP2009193804A	2009-08-27

NAITO, Hiroki et al. (JP)
Hiroki Naito (JP)

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