Title:
PIEZOELECTRIC ELEMENT AND METHOD FOR MANUFACTURING SAME
Document Type and Number:
WIPO Patent Application WO/2021/053933
Kind Code:
A1
Abstract:
This piezoelectric element (100) comprises a piezoelectric layer (110), a first electrode layer (120), a second electrode layer (130), and a connection electrode (140). At least a portion of the second electrode layer (130) faces the first electrode layer (120) with the piezoelectric layer (110) therebetween. The second electrode layer (130) has a connection surface (131). The connection surface (131) faces a through-hole (113) in a region that is in the second electrode (130) and that does not face the first electrode layer (120). The connection electrode (140) is provided on the connection surface (131). The difference in position between the connection surface (131) and a portion, of a surface on the piezoelectric layer (110) side of the second electrode layer (130), other than the connection surface (131) is no greater than 5 nm.
Inventors:
SUZUKI MASAYUKI (JP)
IKEUCHI SHINSUKE (JP)
KUROKAWA FUMIYA (JP)
KISHIMOTO YUTAKA (JP)
YAMADA HAJIME (JP)
KOBAYASHI MASATO (JP)
IKEUCHI SHINSUKE (JP)
KUROKAWA FUMIYA (JP)
KISHIMOTO YUTAKA (JP)
YAMADA HAJIME (JP)
KOBAYASHI MASATO (JP)
Application Number:
PCT/JP2020/026382
Publication Date:
March 25, 2021
Filing Date:
July 06, 2020
Export Citation:
Assignee:
MURATA MANUFACTURING CO (JP)
International Classes:
H01L41/047; H01L41/187; H01L41/29; H01L41/313; H01L41/332; H01L41/337
Foreign References:
| JP2013026250A | 2013-02-04 | |||
| JP2015019310A | 2015-01-29 | |||
| JP2008244725A | 2008-10-09 | |||
| JP2010118730A | 2010-05-27 |
Attorney, Agent or Firm:
FUKAMI PATENT OFFICE, P.C. (JP)
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