Title:
PIEZOELECTRIC ELEMENT, AND SENSOR AND ACTUATOR EMPLOYING SAME
Document Type and Number:
WIPO Patent Application WO/2022/163722
Kind Code:
A1
Abstract:
Provided is a piezoelectric element with which a leakage current is suppressed and piezoelectric characteristics are improved. In the piezoelectric element, a piezoelectric layer and a first electrode are stacked in this order on a substrate, and a leakage current suppressing layer is disposed either between the first electrode and the piezoelectric layer, or between the substrate and the piezoelectric layer. A ratio of electrostatic capacitance per unit surface area of the leakage current suppressing layer to electrostatic capacitance per unit surface area of the piezoelectric layer is at least equal to 1.20 and less than 60.00.
Inventors:
ISHIKAWA TAKETO (JP)
TSUBURAOKA GAKU (JP)
NAKAMURA DAISUKE (JP)
MACHINAGA HIRONOBU (JP)
TSURUTA HIJIRI (JP)
TSUBURAOKA GAKU (JP)
NAKAMURA DAISUKE (JP)
MACHINAGA HIRONOBU (JP)
TSURUTA HIJIRI (JP)
Application Number:
PCT/JP2022/002951
Publication Date:
August 04, 2022
Filing Date:
January 26, 2022
Export Citation:
Assignee:
NITTO DENKO CORP (JP)
International Classes:
G01L1/16; H01L41/09; H01L41/113; H01L41/187
Foreign References:
| JP2009130182A | 2009-06-11 | |||
| JP2020057785A | 2020-04-09 | |||
| JP2019161098A | 2019-09-19 |
Attorney, Agent or Firm:
ITOH, Tadashige et al. (JP)
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