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Patent Searching and Data


Title:
PIEZOELECTRIC ELEMENT
Document Type and Number:
WIPO Patent Application WO/2021/053886
Kind Code:
A1
Abstract:
This piezoelectric element (100) comprises a piezoelectric layer (110), a first electrode layer (120), a second electrode layer (130), and a connection electrode (140). The piezoelectric layer (110) has a first surface (111), a second surface (112), and a through hole (113). The second electrode layer (130) is positioned at the second surface (112) side of the piezoelectric layer (110). The second electrode layer (130) faces the through hole (113). The second electrode layer (130) includes silicon as a main component. The connection electrode (140) is provided on a connection surface (131) facing the through hole (113) of the second electrode layer (130). The connection electrode (140) is made of metal. The surface roughness (Ra) of the connection surface (131) is greater than the surface roughness (Ra) of a main surface (132) which is a part other than the connection surface (131) of the surface of the piezoelectric layer (110) side of the second electrode layer (130).

Inventors:
KISHIMOTO YUTAKA (JP)
IKEUCHI SHINSUKE (JP)
SUZUKI MASAYUKI (JP)
KUROKAWA FUMIYA (JP)
Application Number:
PCT/JP2020/021062
Publication Date:
March 25, 2021
Filing Date:
May 28, 2020
Export Citation:
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Assignee:
MURATA MANUFACTURING CO (JP)
International Classes:
H01L41/04; H01L41/047; H01L41/09; H01L41/187
Foreign References:
JP2010118730A2010-05-27
JP2018056349A2018-04-05
JP2008026274A2008-02-07
Attorney, Agent or Firm:
FUKAMI PATENT OFFICE, P.C. (JP)
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