Title:
PIEZOELECTRIC LAMINATE, PIEZOELECTRIC ELEMENT, AND PIEZOELECTRIC LAMINATE MANUFACTURING METHOD
Document Type and Number:
WIPO Patent Application WO/2020/116123
Kind Code:
A1
Abstract:
The present invention is provided with a substrate, an electrode film, and a piezoelectric film comprising an alkali niobium oxide having a perovskite structure represented by compositional formula (K1-xNax)NbO3(0
Inventors:
SHIBATA KENJI (JP)
WATANABE KAZUTOSHI (JP)
HORIKIRI FUMIMASA (JP)
WATANABE KAZUTOSHI (JP)
HORIKIRI FUMIMASA (JP)
Application Number:
PCT/JP2019/044775
Publication Date:
June 11, 2020
Filing Date:
November 14, 2019
Export Citation:
Assignee:
SCIOCS CO LTD (JP)
SUMITOMO CHEMICAL CO (JP)
SUMITOMO CHEMICAL CO (JP)
International Classes:
C23C14/08; H01L41/047; H01L41/09; H01L41/113; H01L41/187; H01L41/29; H01L41/316; H01L41/319; H01L41/332; H03H3/02; H03H9/17; C01G33/00
Foreign References:
| JP2017538189A | 2017-12-21 | |||
| US20150376068A1 | 2015-12-31 | |||
| JP2018190891A | 2018-11-29 | |||
| JP2011143259A | 2011-07-28 | |||
| JP2007184513A | 2007-07-19 | |||
| JP2008159807A | 2008-07-10 |
Attorney, Agent or Firm:
FUKUOKA Masahiro et al. (JP)
Download PDF: