Login| Sign Up| Help| Contact|

Patent Searching and Data


Title:
PIEZOELECTRIC LAMINATE, PIEZOELECTRIC ELEMENT, AND PIEZOELECTRIC LAMINATE MANUFACTURING METHOD
Document Type and Number:
WIPO Patent Application WO/2020/116123
Kind Code:
A1
Abstract:
The present invention is provided with a substrate, an electrode film, and a piezoelectric film comprising an alkali niobium oxide having a perovskite structure represented by compositional formula (K1-xNax)NbO3(0

Inventors:
SHIBATA KENJI (JP)
WATANABE KAZUTOSHI (JP)
HORIKIRI FUMIMASA (JP)
Application Number:
PCT/JP2019/044775
Publication Date:
June 11, 2020
Filing Date:
November 14, 2019
Export Citation:
Click for automatic bibliography generation   Help
Assignee:
SCIOCS CO LTD (JP)
SUMITOMO CHEMICAL CO (JP)
International Classes:
C23C14/08; H01L41/047; H01L41/09; H01L41/113; H01L41/187; H01L41/29; H01L41/316; H01L41/319; H01L41/332; H03H3/02; H03H9/17; C01G33/00
Foreign References:
JP2017538189A2017-12-21
US20150376068A12015-12-31
JP2018190891A2018-11-29
JP2011143259A2011-07-28
JP2007184513A2007-07-19
JP2008159807A2008-07-10
Attorney, Agent or Firm:
FUKUOKA Masahiro et al. (JP)
Download PDF: