PIEZOELECTRIC MEMS SENSOR AND RELEVANT DEVICE

WIPO Patent Application WO/2021/082764

A1

Disclosed in embodiments of the present invention are a piezoelectric MEMS sensor and a relevant device, applied to scenarios such as a terminal, a smart loudspeaker, wireless Bluetooth earbuds, an active noise reduction headset, a laptop, and automobile industry. The piezoelectric MEMS sensor comprises a base having a sound inlet channel and at least one cantilever beam. The cantilever beam comprises a first region and a second region which are connected to each other. The first region comprises a first side face and a second side face. The first side face is the side face of the first region facing toward a target face. The target face is a face where the cantilever beam is connected to the base. The included angle between the first side face and the second side face is greater than or equal to 90 degrees and less than 180 degrees, so that the two sides of the region of the cantilever beam near the base are less restricted, and the two sides of the cantilever beam would not be constrained by other structures, thereby effectively ensuring free deformation of the cantilever beam, helping to make stress distribution of the cantilever beam more uniform, and effectively improving the signal-to-noise ratio and sensitivity.

JPH0722959	[Name of device] Ultrasonic receiver array
JP2008061081	PIEZOELECTRIC SPEAKER
JP2013236130	ELECTRONIC APPARATUS, CONTROL METHOD, AND CONTROL PROGRAM

YAO DANYANG (CN)
XU JINGHUI (CN)

PCT/CN2020/115104

May 06, 2021

September 14, 2020

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HUAWEI TECH CO LTD (CN)

H04R17/00

WO2017049278A1	2017-03-23
WO2018050551A1	2018-03-22

CN103460721A	2013-12-18
US20180186623A1	2018-07-05
CN201911053981A	2019-10-31

See also references of EP 4037335A4

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