Title:
PIEZOELECTRIC MICROPHONE AND PIEZOELECTRIC MICROPHONE APPARATUS
Document Type and Number:
WIPO Patent Application WO/2022/110289
Kind Code:
A1
Abstract:
Provided are a piezoelectric microphone and a piezoelectric microphone apparatus. The piezoelectric microphone comprises: a base, which has an accommodating cavity; a cantilever beam, which is fixed to the base, wherein a piezoelectric laminated structure is arranged on the cantilever beam; a sacrificial layer, which is arranged between the base and the cantilever beam; and a structural layer, which is arranged on the cantilever beam, wherein the thickness of the structural layer is greater than the thickness of the piezoelectric laminated structure, and the length of the structural layer is less than the length of the cantilever beam. In this way, in the piezoelectric microphone in the present application, an anchoring position of a cantilever beam can be accurately controlled, thereby improving the sensitivity of the microphone and also improving the consistency between the sensitivity and a resonant frequency.
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Inventors:
SHI ZHENGYU (CN)
SHEN YU (CN)
SHEN YU (CN)
Application Number:
PCT/CN2020/134498
Publication Date:
June 02, 2022
Filing Date:
December 08, 2020
Export Citation:
Assignee:
AAC ACOUSTIC TECH SHENZHEN CO LTD (CN)
AAC TECH NANJING CO LTD (CN)
AAC TECH NANJING CO LTD (CN)
International Classes:
H04R17/02
Foreign References:
| CN103460721A | 2013-12-18 | |||
| CN111328005A | 2020-06-23 | |||
| CN102138338A | 2011-07-27 | |||
| CN208987175U | 2019-06-14 | |||
| CN108140723A | 2018-06-08 | |||
| CN111050256A | 2020-04-21 | |||
| CN110475191A | 2019-11-19 |
Attorney, Agent or Firm:
SHENZHEN CHINA INNOVATION SOUTH INTELLECTUAL PROPERTY AGENCY CO., LTD. (CN)
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