Title:
PIEZOELECTRIC VIBRATOR AND MANUFACTURING METHOD THEREOF
Document Type and Number:
WIPO Patent Application WO/2021/045094
Kind Code:
A1
Abstract:
A crystal oscillator (1) comprising: a crystal oscillating element (10) having a pair of electrodes (14a, 14b) including electrodes that are facing each other; and a holder that houses the crystal oscillating element (10). At least one electrode among the pair of electrodes (14a, 14b) has an upper layer (22) including metal and a lower layer (21) including chromium provided between a crystal piece (11) and the upper layer (22). The surface of at least one electrode has a plurality of crystal grains (23) comprising metal and a chromium compound (27) formed along the grain boundary (24) of the plurality of crystal grains. The area ratio of the plurality of crystal grains (23) when the surface of at least one electrode is viewed in the planar view is 35%–60%.
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Inventors:
OJIMA SHIGEO (JP)
USHIRO MASAKI (JP)
YAMAMOTO HIROYUKI (JP)
USHIRO MASAKI (JP)
YAMAMOTO HIROYUKI (JP)
Application Number:
PCT/JP2020/033244
Publication Date:
March 11, 2021
Filing Date:
September 02, 2020
Export Citation:
Assignee:
MURATA MANUFACTURING CO (JP)
International Classes:
H03H3/02; H03H9/19
Foreign References:
| JP2003078383A | 2003-03-14 | |||
| JP2011160095A | 2011-08-18 | |||
| JP2016144091A | 2016-08-08 | |||
| JP2005269628A | 2005-09-29 | |||
| JP2014200042A | 2014-10-23 | |||
| JP2016054363A | 2016-04-14 |
Attorney, Agent or Firm:
INABA, Yoshiyuki et al. (JP)
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