Title:
PLANAR SOLENOID RELAY AND PRODUCTION METHOD THEREOF
Document Type and Number:
WIPO Patent Application WO/1995/017760
Kind Code:
A1
Abstract:
This invention relates to a thin and compact solenoid relay produced by employing semiconductor production technique. A flat sheet-like movable plate (5) and a torsion bar (6) for pivotally supporting the movable plate (5) are integrally formed on a silicon substrate (2) by employing semiconductor production technique. A flat surface coil (7) is disposed on the upper surface of the movable plate (5) and a movable contact (9), on the lower surface side. Further, glass substrates (3) and (4) are disposed on the upper and lower surfaces of the silicon substrate (2), and a fixed contact (11) capable of coming into contact with the movable contact (9) is disposed on the lower glass substrate (4). Permanent magnets (13A, 13B and 14A, 14B for causing a magnetic field to act ont the flat surface coil are fixedly disposed on the glass substrates (3) and (4). Power is fed to the flat surface coil (7) to generate the magnetic force so as to rotate the movable plate (5) against torsion of the torsion bar (6) and to bring the movable contact (9) and the fixed contact (11) into contact with, or out of contact from, each other.
Inventors:
ESASHI MASAYOSHI (JP)
ASADA NORIHIRO (JP)
ASADA NORIHIRO (JP)
Application Number:
PCT/JP1994/002063
Publication Date:
June 29, 1995
Filing Date:
December 08, 1994
Export Citation:
Assignee:
NIPPON SIGNAL CO LTD (JP)
ESASHI MASAYOSHI (JP)
ASADA NORIHIRO (JP)
ESASHI MASAYOSHI (JP)
ASADA NORIHIRO (JP)
International Classes:
H01H49/00; B81B3/00; B81C1/00; H01H50/00; H01H51/22; H01H51/24; H01H1/20; (IPC1-7): H01H51/26
Foreign References:
| JPH01292725A | 1989-11-27 | |||
| JPH0458430A | 1992-02-25 | |||
| JPS60107229A | 1985-06-12 | |||
| JPH056832A | 1993-01-14 |
Other References:
See also references of EP 0685864A4
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