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Title:
PLASMA CELL FOR LASER SUSTAINED PLASMA LIGHT SOURCE
Document Type and Number:
WIPO Patent Application WO/2013/066576
Kind Code:
A3
Abstract:
A refillable plasma cell for use in a laser-sustained plasma light source includes a plasma bulb, the bulb being formed from a glass material substantially transparent to a selected wavelength of radiation, and a gas port assembly, the gas port assembly being operably connected to the bulb and disposed at a first portion of the gas bulb, wherein the bulb is configured to selectively receive a gas from a gas source via the gas port assembly.

Inventors:
CHIMMALGI ANANT (US)
SHCHEMELININ ANATOLY (US)
BEZEL ILYA (US)
PATIL RAJEEV (US)
Application Number:
PCT/US2012/059448
Publication Date:
July 18, 2013
Filing Date:
October 10, 2012
Export Citation:
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Assignee:
KLA TENCOR CORP (US)
International Classes:
H01J63/08; H01J61/12
Foreign References:
US7705331B12010-04-27
US20090322240A12009-12-31
US20080258085A12008-10-23
US20100097808A12010-04-22
KR20070110891A2007-11-20
Other References:
See also references of EP 2766919A4
Attorney, Agent or Firm:
MCANDREWS, Kevin (Legal DepartmentOne Technology Driv, Milpitas California, US)
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