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Title:
PLASMA DISCHARGE PROCESSING DEVICE AND PRODUCTION METHOD OF GAS BARRIER FILM
Document Type and Number:
WIPO Patent Application WO/2007/026545
Kind Code:
A1
Abstract:
A high-function film producing method reduced in surface trouble and improved in yield, and a producing device therefor. This producing device is a plasma discharge processing system for performing plasma discharge processing on the surface of a base material continuously transferred between a winder and an unwinder at the atmospheric pressure or at a pressure in the vicinity thereof, characterized in that the surface to be processed of the base material is transferred between the winder and the unwinder without contacting anything except for nip rollers isolating a discharge portion from the outside. A method of producing a gas barrier film being reduced in surface trouble (cracking trouble) when a gas barrier thin film is formed and having a high gas barrier property, characterized by providing a radius of surface curvature during transferring of at least 75 mm on the gas barrier thin film side of a formed gas barrier film and a radius of surface curvature of at least 37.5 mm on the opposite side thereof.

Inventors:
OZAKI KOJI (JP)
FUKUDA KAZUHIRO (JP)
ARITA HIROAKI (JP)
Application Number:
PCT/JP2006/316139
Publication Date:
March 08, 2007
Filing Date:
August 17, 2006
Export Citation:
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Assignee:
KONICA MINOLTA HOLDINGS INC (JP)
OZAKI KOJI (JP)
FUKUDA KAZUHIRO (JP)
ARITA HIROAKI (JP)
International Classes:
C23C16/50; C23C16/54
Foreign References:
JP2001067657A2001-03-16
JP2000239849A2000-09-05
JPH1088355A1998-04-07
JP2000260715A2000-09-22
JP2003205575A2003-07-22
JP2004339546A2004-12-02
JP2002339075A2002-11-27
JP2003171770A2003-06-20
JPH0863746A1996-03-08
JPH02251429A1990-10-09
JP2003171770A2003-06-20
JPS5312953B21978-05-06
JPS58217344A1983-12-17
US6268695B12001-07-31
JPS59151110A1984-08-29
JPS59151112A1984-08-29
JPH01105738A1989-04-24
JPH10154598A1998-06-09
JP2003049272A2003-02-21
JP2004068143A2004-03-04
JPH1116696A1999-01-22
JP2000301655A2000-10-31
Other References:
See also references of EP 1921180A4
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