Title:
PLASMA GENERATOR, AND PLASMA-BASED CLEANING DEVICE
Document Type and Number:
WIPO Patent Application WO/2020/087683
Kind Code:
A1
Abstract:
A plasma generator (100) and a plasma-based cleaning device (200) utilizing the plasma generator (100), use to treat a surface (S). The plasma generator (100) comprises at least one plasma nozzle assembly (110) comprising a plurality of plasma nozzles (111) and a common flow channel (112). Outlet ends (1112) of each of the plasma nozzles (111) face the surface (S) and have equal distances thereto. The plasma-based cleaning device (200) utilizing the plasma generator (100) is particularly suitable for cleaning curved cover plates as a result of the modular structure of the plasma generator (100), and optimizes cleaning uniformity.
Inventors:
WANG YONGQING (CN)
Application Number:
PCT/CN2018/121357
Publication Date:
May 07, 2020
Filing Date:
December 15, 2018
Export Citation:
Assignee:
WUHAN CHINA STAR OPTOELECTRONICS TECHNOLOGY CO LTD (CN)
International Classes:
B08B7/00; B08B5/04; H05H1/24
Foreign References:
| CN105080922A | 2015-11-25 | |||
| CN104797070A | 2015-07-22 | |||
| CN202207679U | 2012-05-02 | |||
| CN204710807U | 2015-10-21 | |||
| JP2010074065A | 2010-04-02 | |||
| CN102881551A | 2013-01-16 | |||
| CN207692123U | 2018-08-03 | |||
| CN203470419U | 2014-03-12 |
Attorney, Agent or Firm:
ESSEN PATENT&TRADEMARK AGENCY (CN)
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