Title:
PLASMA GENERATOR ELECTRODE AND MANUFACTURING METHOD THEREOF
Document Type and Number:
WIPO Patent Application WO/2019/109966
Kind Code:
A1
Abstract:
A plasma generator electrode and a manufacturing method thereof. The electrode comprises a substrate (1), an array of columnar structures (2) and an array of needle-like structures (3) formed on the substrate (1). The array of needle-like structures (3) is formed on the substrate (1) outside the array of columnar structures (2) and at the bottom of the array of columnar structures (2). The structure makes full use of cross-scale coordination of the columnar structures (2) and needle-like structures (3). The geometrical tip effect of the needle-like structures (3) promotes direct transformation of gas into a plasma state by concentrating a local electric field. The side walls of the columnar structures (2) contain a large number of surface states, capable of further promoting proliferation and maintenance of plasma diffusion within a space to efficiently form a wide distribution range of high density plasma under low voltage driving conditions. The electrode manufacturing method utilizes a noble metal that, after catalytic etching of the substrate (1) to form columnar structures (2), continues to act as a catalyst for the growing of the subsequent needle-like structures (3), thereby achieving high efficiency, cost economies and a consistent cross-scale micro-fabrication effect.
Inventors:
WANG YUHUA (CN)
Application Number:
PCT/CN2018/119490
Publication Date:
June 13, 2019
Filing Date:
December 06, 2018
Export Citation:
Assignee:
SHANGHAI PROFOUND ENVIRONMENTAL TECH CO LTD (CN)
International Classes:
H01J9/02
Domestic Patent References:
| WO2003056602A1 | 2003-07-10 |
Foreign References:
| CN107845559A | 2018-03-27 | |||
| CN207529904U | 2018-06-22 | |||
| CN108079759A | 2018-05-29 | |||
| CN108283869A | 2018-07-17 | |||
| CN207980819U | 2018-10-19 | |||
| CN102448240A | 2012-05-09 | |||
| CN102500303A | 2012-06-20 | |||
| CN203346481U | 2013-12-18 | |||
| CN106276775A | 2017-01-04 | |||
| US20150245458A1 | 2015-08-27 |
Attorney, Agent or Firm:
SHANGHAI HUIHAN INTELLECTUAL PROPERTY LAW FIRM (CN)
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