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Patent Searching and Data


Title:
PLASMA IRRADIATION DEVICE
Document Type and Number:
WIPO Patent Application WO/2020/059809
Kind Code:
A1
Abstract:
This plasma irradiation device (100) is provided with: an irradiation tool (10) having a plasma generator and discharging a plasma generated by the plasma generator and/or an activated gas produced by the plasma; a supply unit (20) having a power supply part for supplying electricity to the plasma generator and adjusting the voltage, and a control part for controlling the power supply part; electrical wiring (40) electrically connecting the irradiation tool (10) and the supply unit (20); and electromagnetic wave shielding materials covering the respective outer periphery of the irradiation tool (10), the supply unit (20), and the electrical wiring (40). The electromagnetic wave shielding material (50) covering the outer periphery of the electrical wiring (40) is flexible.

Inventors:
NAGAHARA YU (JP)
MATSUO TATSUYA (JP)
ATAKA MOTOHARU (JP)
INOUE TSUYOSHI (JP)
UEHARA TSUYOSHI (JP)
Application Number:
PCT/JP2019/036798
Publication Date:
March 26, 2020
Filing Date:
September 19, 2019
Export Citation:
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Assignee:
SEKISUI CHEMICAL CO LTD (JP)
International Classes:
H05H1/00; A61C1/08; A61C19/06; H05H1/26
Foreign References:
JPH08124431A1996-05-17
JPH03114678A1991-05-15
JPH0539770U1993-05-28
JP2007080784A2007-03-29
Attorney, Agent or Firm:
NISHIZAWA Kazuyoshi et al. (JP)
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