Title:
POLISHING BRUSH HOLDER AND POLISHING DEVICE
Document Type and Number:
WIPO Patent Application WO/2019/138471
Kind Code:
A1
Abstract:
A polishing device (1) includes a polishing brush (3) and a polishing brush holder (4) that holds the polishing brush (3). The polishing brush holder (4) includes a shank (6), a support mechanism (21) that has a sleeve (7) and supports the polishing brush (3) so as to be movable in an axial direction L of the shank (6), and a moving mechanism (22) that moves the polishing brush (3) in the axial direction L. The polishing brush holder (4) includes a pressure sensor (53) that detects a load (sensor detection pressure (P)) applied to the polishing brush (3) from a workpiece (W) when the workpiece (W) is polished by the polishing brush (3) supported by the support mechanism (21), and a control unit (51) that drives the moving mechanism (22) on the basis of the output (sensor detection pressure (P)) from the pressure sensor (53) to move the polishing brush (3) in the axial direction L.
Inventors:
FUKUSHIMA KEISUKE (JP)
SATO YOICHI (JP)
SATO YOICHI (JP)
Application Number:
PCT/JP2018/000340
Publication Date:
July 18, 2019
Filing Date:
January 10, 2018
Export Citation:
Assignee:
XEBEC TECH CO LTD (JP)
TAIMEI CHEMICALS CO LTD (JP)
TAIMEI CHEMICALS CO LTD (JP)
International Classes:
B24B49/16; B24B29/00; B24D13/14
Domestic Patent References:
| WO2016021460A1 | 2016-02-11 |
Foreign References:
| JPH0179553U | 1989-05-29 | |||
| JP2017100274A | 2017-06-08 | |||
| JP2005169589A | 2005-06-30 | |||
| JPH10286772A | 1998-10-27 | |||
| JP2016087757A | 2016-05-23 | |||
| JP2003311535A | 2003-11-05 |
Attorney, Agent or Firm:
KAWAI Toru et al. (JP)
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