Title:
POLISHING COMPOSITION
Document Type and Number:
WIPO Patent Application WO/2018/180479
Kind Code:
A1
Abstract:
Provided is a polishing composition capable of effectively reducing an edge roll-off amount. A polishing composition provided by the present invention contains abrasive grains, a basic compound, a nitrogen-containing water-soluble polymer, and water. The nitrogen-containing water-soluble polymer does not include N-H bonds in molecules thereof.
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Inventors:
NUMATA KEISUKE (JP)
TSUCHIYA KOHSUKE (JP)
TANIGUCHI MEGUMI (JP)
TAKEMOTO TAKAYUKI (JP)
TSUCHIYA KOHSUKE (JP)
TANIGUCHI MEGUMI (JP)
TAKEMOTO TAKAYUKI (JP)
Application Number:
PCT/JP2018/009865
Publication Date:
October 04, 2018
Filing Date:
March 14, 2018
Export Citation:
Assignee:
FUJIMI INC (JP)
TOAGOSEI CO LTD (JP)
TOAGOSEI CO LTD (JP)
International Classes:
H01L21/304; B24B37/00; C09K3/14
Domestic Patent References:
| WO2011135949A1 | 2011-11-03 | |||
| WO2012005289A1 | 2012-01-12 |
Foreign References:
| JP2015174918A | 2015-10-05 | |||
| JP5007062B2 | 2012-08-22 | |||
| JP2013165173A | 2013-08-22 | |||
| JP6068647B2 | 2017-01-25 | |||
| JP2017072667A | 2017-04-13 | |||
| JP2016124943A | 2016-07-11 | |||
| JP2014216464A | 2014-11-17 |
Other References:
See also references of EP 3605588A4
Attorney, Agent or Firm:
ABE, Makoto (JP)
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