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Title:
POLISHING COMPOSITION
Document Type and Number:
WIPO Patent Application WO/2020/196369
Kind Code:
A1
Abstract:
A polishing composition provided by the present invention comprises abrasive grains, a poly(vinyl alcohol)-based polymer as a water-soluble polymer, a basic compound, and water and further contains a polyvalent organic acid (salt) having a valence of 3 or higher.

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Inventors:
YAMAGUCHI YOSHIKO (JP)
GOTO OSAMU (JP)
TSUCHIYA KOHSUKE (JP)
ICHITSUBO TAIKI (JP)
Application Number:
PCT/JP2020/012622
Publication Date:
October 01, 2020
Filing Date:
March 23, 2020
Export Citation:
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Assignee:
FUJIMI INC (JP)
International Classes:
C09K3/14; B24B37/00; H01L21/304
Foreign References:
CN102786879A2012-11-21
CN108239484A2018-07-03
JP2003086546A2003-03-20
JP2019058620A2019-04-18
JPH11140427A1999-05-25
JP5474400B22014-04-16
JPS6029895B21985-07-13
JPS6050125B21985-11-07
Other References:
See also references of EP 3950876A4
Attorney, Agent or Firm:
ABE, Makoto (JP)
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