Title:
POLISHING COMPOSITION
Document Type and Number:
WIPO Patent Application WO/2021/149791
Kind Code:
A1
Abstract:
Provided is a novel polishing composition. This polishing composition is configured to contain a water-soluble polymer comprising at least a vinyl alcohol resin that includes a side chain group having 3 or more carbons.
Inventors:
MURAKAMI TAKASHI (JP)
KIMURA YOSHIHIRO (JP)
KIMURA YOSHIHIRO (JP)
Application Number:
PCT/JP2021/002202
Publication Date:
July 29, 2021
Filing Date:
January 22, 2021
Export Citation:
Assignee:
JAPAN VAM & POVAL CO LTD (JP)
International Classes:
B82B1/00; B24B37/00; C08F8/12; C08K3/36; C08L29/04; C09K3/14; H01L21/304
Foreign References:
| JP2019151849A | 2019-09-12 | |||
| JP2006186356A | 2006-07-13 | |||
| JP2019195020A | 2019-11-07 | |||
| JP2018030765A | 2018-03-01 |
Attorney, Agent or Firm:
IWATANI Ryo (JP)
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