Title:
POLISHING COMPOSITION
Document Type and Number:
WIPO Patent Application WO/2021/182276
Kind Code:
A1
Abstract:
Provided is a polishing composition capable of improving a surface quality of a polished object. A polishing composition includes abrasive grains, a water-soluble copolymer, a basic compound and water. The water-soluble copolymer is a copolymer having an N-(meth)acryloylmorpholine unit and a vinyl alcohol unit.
Inventors:
GOTO OSAMU (JP)
TSUCHIYA KOHSUKE (JP)
TAKAMA DAIKI (JP)
YAMAUCHI RYOSUKE (JP)
TSUBOUCHI RYUTARO (JP)
GOTOU AKIHIRO (JP)
TSUCHIYA KOHSUKE (JP)
TAKAMA DAIKI (JP)
YAMAUCHI RYOSUKE (JP)
TSUBOUCHI RYUTARO (JP)
GOTOU AKIHIRO (JP)
Application Number:
PCT/JP2021/008366
Publication Date:
September 16, 2021
Filing Date:
March 04, 2021
Export Citation:
Assignee:
FUJIMI INC (JP)
TOAGOSEI CO LTD (JP)
TOAGOSEI CO LTD (JP)
International Classes:
C09G1/02; B24B37/00; C09K3/14; H01L21/304
Domestic Patent References:
| WO2015068672A1 | 2015-05-14 | |||
| WO2017002433A1 | 2017-01-05 | |||
| WO2014196299A1 | 2014-12-11 | |||
| WO2018043504A1 | 2018-03-08 |
Attorney, Agent or Firm:
ABE, Makoto (JP)
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