POLISHING DEVICE AND POLISHING METHOD

Title:

POLISHING DEVICE AND POLISHING METHOD

Document Type and Number:

WIPO Patent Application WO/1999/051396

Kind Code:

A1

Abstract:

A polishing device capable of polishing a work by rotating the work while pressing a polishing tape against the work by a pressing member from its rear side, comprising an oscillating type holding device (260) which holds the pressing member (96) oscillatingly about an oscillating axis (Ls) spatially crossing at right angle a rotating axis of the work (10) with respect to a cartridge (72) for holding the pressing member (96) in order to increase a follow-up capability of the pressing member to the work, whereby the pressing member (96) can follow up the work (10) because the pressing member (96) is oscillated relative to the cartridge (72) during polishing.

Inventors:

OHASHI YUJI (JP)
KIRIYAMA KAZUO (JP)

Application Number:

PCT/JP1999/001645

Publication Date:

October 14, 1999

Filing Date:

March 30, 1999

Export Citation:

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Assignee:

TOYOTA MOTOR CO LTD (JP)
OHASHI YUJI (JP)
KIRIYAMA KAZUO (JP)

International Classes:

B24B21/00; B24B5/42; B24B19/12; B24B21/06; B24B21/08; B24B21/16; (IPC1-7): B24B21/16

Foreign References:

JPH0388657U	1991-09-10
JPH08257889A	1996-10-08
JPH0819950A	1996-01-23
JPH058163A	1993-01-19

Other References: