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Patent Searching and Data


Title:
POLISHING HEAD CAPABLE OF PREVENTING WATER ACCUMULATION
Document Type and Number:
WIPO Patent Application WO/2019/019941
Kind Code:
A1
Abstract:
The invention discloses a polishing head (100) capable of preventing water accumulation. The polishing head (100) comprises a base body (30), a clamping sheet assembly (10), and a cap body (20), and further comprising a gland (50), which is sealingly connected to an upper portion of the clamping sheet assembly (10). The cover body (20) comprises a top cover (21) and an enclosing plate (22), and the top cover (21) is sealingly connected with the upper portion of the base body (30). The enclosing plate (22) is disposed on the outer side of the gland (50), and the gland (50) and the enclosing plate (22) are provided with a gap. The gland (50) moves up and down relative to the enclosing plate (22), and the gland (50) and the enclosing plate (22) at least partially overlap.

Inventors:
ZHAO DEWEN (CN)
LU XINCHUN (CN)
CHEN XIANGYU (CN)
Application Number:
PCT/CN2018/096003
Publication Date:
January 31, 2019
Filing Date:
July 17, 2018
Export Citation:
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Assignee:
UNIV TSINGHUA (CN)
HWATSING TECH CO LTD (CN)
International Classes:
B24B37/11
Foreign References:
CN107253134A2017-10-17
KR100897226B12009-05-14
CN102172888A2011-09-07
JP2008044064A2008-02-28
Attorney, Agent or Firm:
TSINGYIHUA INTELLECTUAL PROPERTY LLC (CN)
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