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Title:
POLISHING LIQUID FEEDING SYSTEM
Document Type and Number:
WIPO Patent Application WO/2021/164674
Kind Code:
A1
Abstract:
A polishing liquid feeding system, comprising a polishing liquid preparation device (1), a washing liquid feeding device (2), and a filtering device (3), and further comprising a feeding pipeline (10) communicating the polishing liquid preparation device (1) with the filtering device (3), and a washing pipeline (20) communicating the washing liquid feeding device (2) with the filtering device (3). The polishing liquid preparation device (1) is used for preparing a polishing liquid, and conveying the prepared polishing liquid to the filtering device (3) by means of the feeding pipeline (10); the filtering device (3) is used for filtering the polishing liquid, and conveying the filtered polishing liquid to a polishing device (4) that is communicated with the filtering device (3); the washing liquid feeding device (2) is used for conveying a washing liquid to the filtering device (3) by means of the washing pipeline (20). The polishing liquid feeding system can complete the feeding of the polishing liquid and the washing of the filtering device, without detaching any device, and the residual polishing liquid in the filtering device does not drip, thereby improving the washing efficiency of the filtering device and the reliability of the polishing liquid feeding system.

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Inventors:
JIANG FUYOU (CN)
KUO HUNG-HSIANG (CN)
KU CHIN-CHUNG (CN)
Application Number:
PCT/CN2021/076408
Publication Date:
August 26, 2021
Filing Date:
February 09, 2021
Export Citation:
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Assignee:
CHANGXIN MEMORY TECH INC (CN)
International Classes:
B24B57/02; B24B37/04
Foreign References:
CN206123453U2017-04-26
CN206123453U2017-04-26
US6165048A2000-12-26
CN1356369A2002-07-03
CN207223702U2018-04-13
CN208913880U2019-05-31
CN205465749U2016-08-17
Attorney, Agent or Firm:
SHANGHAI CHENHAO INTELLECTUAL PROPERTY LAW FIRM GENERAL PARTNERSHIP (CN)
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