Title:
POLISHING LOADING AND UNLOADING COMPONENT MODULE CONTAINING MOVABLE LOADING AND UNLOADING MODULE
Document Type and Number:
WIPO Patent Application WO/2020/056818
Kind Code:
A1
Abstract:
Disclosed is a polishing loading and unloading component module containing a movable loading and unloading module. The polishing loading and unloading component module comprises one loading and unloading module and two polishing modules, wherein the loading and unloading module is centered, the two polishing modules are located on either side of the loading and unloading module, the loading and unloading module is provided with two loading and unloading positions in the direction perpendicular to the arrangement direction of the loading and unloading module and the two polishing modules, the loading and unloading positions respectively correspond to the two polishing modules, and the loading and unloading module can move back and forth between the two loading and unloading positions. The loading and unloading module contains a linear motion module, a loading and unloading platform module, and a loading and unloading platform fixing block, wherein the linear motion module is fixed to a fixing frame, the loading and unloading platform fixing block is fixed to a sliding block of the linear motion module, and the linear motion module can enable the loading and unloading platform module to move back and forth between the two loading and unloading positions, i.e. a first loading and unloading position and a second loading and unloading position. According to the invention, by means of the movement of the loading and unloading platform module, the processes where a polishing head turns back to an upper portion of a corresponding polishing pad and then turns back to perform cleaning are dispensed with, so that the transmission time can be saved on, and the efficiency thereof is significantly improved.
Inventors:
GU HAIYANG (CN)
ZHANG ZHIJUN (CN)
GU FENG (CN)
WANG DONGHUI (CN)
ZHANG ZHIJUN (CN)
GU FENG (CN)
WANG DONGHUI (CN)
Application Number:
PCT/CN2018/110042
Publication Date:
March 26, 2020
Filing Date:
October 12, 2018
Export Citation:
Assignee:
HANGZHOU SIZONE ELECTRONIC TECH CO LTD (CN)
International Classes:
B24B37/04; B24B37/27; B24B37/34
Foreign References:
| CN105598827A | 2016-05-25 | |||
| CN101157199A | 2008-04-09 | |||
| CN202062281U | 2011-12-07 | |||
| CN106041706A | 2016-10-26 | |||
| JP2000061830A | 2000-02-29 |
Attorney, Agent or Firm:
NANJING ZHISHI LAW FIRM OF INTELLECTUAL PROPERTY (CN)
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