POLISHING NANOFIBER AGGREGATE AND METHOD FOR PRODUCING SAME

Title:

POLISHING NANOFIBER AGGREGATE AND METHOD FOR PRODUCING SAME

Document Type and Number:

WIPO Patent Application WO/2019/106774

Kind Code:

A1

Abstract:

Provided are: a polishing nanofiber aggregate capable of suppressing a reduction in polishing efficiency even when fine abrasive powder is used; and a method for producing the same. A polishing nanofiber aggregate (1) can be used by adsorbing thereon a slurry having fine abrasive powder mixed in a liquid. The polishing nanofiber aggregate (1) has an average fiber diameter (d) of 400-1000 nm, and a porosity (η) of 0.70-0.95. In the polishing nanofiber aggregate (1), the distance (e1) between fibers can be reduced without compromising porosity (η). As a result, it is possible to inhibit abrasive grains having a small particle size from entering the spaces between the fibers.

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Inventors:

IKEGAYA MORIHIKO (JP)
SOTA HIROYOSHI (JP)
HIROGAKI TOSHIKI (JP)
AOYAMA EIICHI (JP)
WU WEI (JP)

Application Number:

PCT/JP2017/042926

Publication Date:

June 06, 2019

Filing Date:

November 29, 2017

Export Citation:

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Assignee:

M TECHX INC (JP)

International Classes:

B24D11/00

Domestic Patent References:

WO2007018165A1

2007-02-15

Foreign References:

JP2010069592A	2010-04-02
JP2008240168A	2008-10-09
JPH02234967A	1990-09-18
JP2012219391A	2012-11-12
JP2012046843A	2012-03-08

Attorney, Agent or Firm:

OPUS IP LAW FIRM (JP)

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