Title:
POLISHING RECIPE DETERMINATION DEVICE
Document Type and Number:
WIPO Patent Application WO/2020/137099
Kind Code:
A1
Abstract:
The information processing device of the present invention is for determining a polishing recipe on the basis of response data for each area acquired by changing pressure for each area of a polishing head, and is provided with: an abnormality presence deduction unit that receives as input new response data for each area, and deduces and outputs whether there is an abnormality; a screening unit that, if the abnormality presence deduction unit deduces that an abnormality is present, receives as input the response data for each area deduced to have an abnormality, and deduces and outputs response data for each area after elimination of the abnormality; and a simulation unit that determines a polishing recipe through simulation on the basis of response data for each area deduced not to have an abnormality by the abnormality presence deduction unit or the response data for each area deduced by the screening unit after the elimination of the abnormality.
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Inventors:
KATO YOSHIKAZU (JP)
FUKUSHIMA MAKOTO (JP)
NAMIKI KEISUKE (JP)
TOGASHI SHINGO (JP)
FUKUSHIMA MAKOTO (JP)
NAMIKI KEISUKE (JP)
TOGASHI SHINGO (JP)
Application Number:
PCT/JP2019/040596
Publication Date:
July 02, 2020
Filing Date:
October 16, 2019
Export Citation:
Assignee:
EBARA CORP (JP)
International Classes:
H01L21/304; B24B37/005
Foreign References:
| JP2015168015A | 2015-09-28 | |||
| US7001243B1 | 2006-02-21 | |||
| JP2014061587A | 2014-04-10 | |||
| JP2018067610A | 2018-04-26 | |||
| JP2003158108A | 2003-05-30 | |||
| JP2006043873A | 2006-02-16 | |||
| JP2005520317A | 2005-07-07 | |||
| JP2013232660A | 2013-11-14 | |||
| JP2018195734A | 2018-12-06 |
Attorney, Agent or Firm:
OHNO Seiji et al. (JP)
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