Login| Sign Up| Help| Contact|

Patent Searching and Data


Title:
POLYURETHANE FOR POLISHING LAYER, POLISHING LAYER, AND POLISHING PAD
Document Type and Number:
WIPO Patent Application WO/2020/036038
Kind Code:
A1
Abstract:
Use is made of a polyurethane for polishing layers that is a thermoplastic polyurethane which is for use as the material of the polishing layers of polishing pads and which is a product of reaction of raw polyurethane materials comprising a polymeric diol, an organic diisocyanate, and one or more chain extenders, the chain extenders comprising 50 mass% or more first chain extender, which includes a linear C7-12 carbon skeleton.

Inventors:
KADOWAKI KIYOFUMI (JP)
KATO MITSURU (JP)
TAKEGOSHI MINORI (JP)
OKAMOTO CHIHIRO (JP)
KATO SHINYA (JP)
Application Number:
PCT/JP2019/028384
Publication Date:
February 20, 2020
Filing Date:
July 19, 2019
Export Citation:
Click for automatic bibliography generation   Help
Assignee:
KURARAY CO (JP)
International Classes:
B24B37/24; C08G18/65; H01L21/304
Domestic Patent References:
WO2018021428A12018-02-01
WO2016084321A12016-06-02
WO2016067588A12016-05-06
WO2018207670A12018-11-15
WO2007034980A12007-03-29
WO2010146982A12010-12-23
WO2016084321A12016-06-02
WO2016067588A12016-05-06
WO2007034980A12007-03-29
Foreign References:
JP2007091898A2007-04-12
JP2015116615A2015-06-25
JP2018029142A2018-02-22
JP2015512799A2015-04-30
JP2014038916A2014-02-27
Attorney, Agent or Firm:
EGAWA Masaru et al. (JP)
Download PDF: