Title:
PRESS APPARATUS, VACUUM FRAME, AND PRESS-FORMING METHOD
Document Type and Number:
WIPO Patent Application WO/2014/188619
Kind Code:
A1
Abstract:
According to an embodiment of the present invention, a press apparatus is provided with: an upper diaphragm, i.e., an elastic film, which vertically partitions an upper space and a main chamber from each other; a lower diaphragm, i.e., an elastic film, which is disposed to face the upper diaphragm, and which vertically partitions the main chamber and a lower space from each other; an atmospheric pressure control apparatus, which controls atmospheric pressure differences between the main chamber inside and the upper space, and between the main chamber inside and the lower space; and a heating apparatus, which heats a subject to be processed, said subject being disposed in the main chamber. The atmospheric pressure control apparatus is configured to perform: pressing wherein the atmospheric pressure in the main chamber is reduced to be lower than the atmospheric pressure in the upper space and that in the lower space, and the subject to be processed is pressed, said subject having been heated between the upper diaphragm and the lower diaphragm; and curing wherein the atmospheric pressure in the main chamber is increased to be higher than the atmospheric pressure in the lower space, and the subject to be processed is heated in a non-vacuum state.
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Inventors:
OKAZAKI SHIZUAKI (JP)
NORIKIYO ISAO (JP)
YUMITO RYOJI (JP)
NORIKIYO ISAO (JP)
YUMITO RYOJI (JP)
Application Number:
PCT/JP2013/081609
Publication Date:
November 27, 2014
Filing Date:
November 25, 2013
Export Citation:
Assignee:
KITAGAWA SEIKI KABUSHIKI KAISHA (JP)
International Classes:
B29C63/16; H01L31/04
Foreign References:
| JPS63276542A | 1988-11-14 | |||
| JP2001102614A | 2001-04-13 | |||
| JP2012030381A | 2012-02-16 | |||
| JP2012080120A | 2012-04-19 |
Attorney, Agent or Firm:
MATSUOKA, Shuhei et al. (JP)
Shuhei Matsuoka (JP)
Shuhei Matsuoka (JP)
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