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Patent Searching and Data


Title:
PRESSURE SENSOR DEVICE
Document Type and Number:
WIPO Patent Application WO/2005/019789
Kind Code:
A1
Abstract:
This pressure sensor device comprises a thin sheet-like diaphragm (12) whose surface is formed with a strain resistance gauge, and a stop member (13) having a recess (14) forming a curve along the displacement forming surface of the diaphragm, with the recess facing the diaphragm. Particularly, the recess in the stop member is formed as a curved surface in which its depth (y) with respect to overpressure protection operating pressure (p) at a distance (x) from the center of the diaphragm is expressed by a quartic function [y = pr4(1-x2/r2)2/64D] where r is the radius, t is the thickness, and D is the bending rigidity of the diaphragm.

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Inventors:
YONEDA MASAYUKI (JP)
MIZOGUCHI JUN (JP)
KAJIO YASUHIRO (JP)
ISHIKAWA MASAYA (JP)
AZUMA YOUICHI (JP)
TSUCHIYA NAOHISA (JP)
Application Number:
PCT/JP2004/012001
Publication Date:
March 03, 2005
Filing Date:
August 20, 2004
Export Citation:
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Assignee:
YAMATAKE CORP (JP)
YONEDA MASAYUKI (JP)
MIZOGUCHI JUN (JP)
KAJIO YASUHIRO (JP)
ISHIKAWA MASAYA (JP)
AZUMA YOUICHI (JP)
TSUCHIYA NAOHISA (JP)
International Classes:
G01L9/04; G01L9/00; G01L19/06; H01L29/84; (IPC1-7): G01L9/04; G01L13/06; G01L19/06
Foreign References:
JPS58180927A1983-10-22
JPS5243474A1977-04-05
Attorney, Agent or Firm:
Nagato, Kanji (8-1 Shinbashi 5-chome, Minato-k, Tokyo 04, JP)
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