Title:
PRESSURIZING MODULE AND DEVICE HANDLER HAVING SAME
Document Type and Number:
WIPO Patent Application WO/2021/071340
Kind Code:
A1
Abstract:
The present invention relates to a pressurizing module and a device handler having same and, more specifically, to a pressurizing module for testing the electrical characteristics of a device, and a device handler having same. Disclosed is a device handler comprising: a loading unit (100) on which trays (2) having a plurality of devices (1) loaded thereon are loaded; a testing unit (300) which tests the plurality of devices (1) transferred from the loading unit (100); an unloading unit (500) which receives the devices (1) from the testing unit (300) and loads the devices (1) on trays (2); a buffer unit (200) which moves at least one buffer tray (210) between a first device exchange position (P1) for exchanging the devices (1) with at least one from among the loading unit (100) and the unloading unit (500), and a second device exchange position (P2) for exchanging the devices (1) with the testing unit (300); a test transfer module (800) including a pair of device pressurizing units (820) which transfer the devices between the second device exchange position (P2) and the testing unit (300) and pressurize the devices for device testing in the testing unit (300), and a module moving unit (870) which alternately positions, by means of horizontal rotation, the pair of device pressurizing units (820) to be at the second device exchange position (P2) and the testing unit (300); and at least one transfer tool (400) which transfers the devices (1) between the first device exchange position (P1) and the trays (2) of the loading unit (100) and the unloading unit (500).
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Inventors:
YOU HONG JUN (KR)
Application Number:
PCT/KR2020/013876
Publication Date:
April 15, 2021
Filing Date:
October 12, 2020
Export Citation:
Assignee:
JT CORP (KR)
International Classes:
G01R31/28; H01L21/673; H01L21/677
Foreign References:
| KR20090120943A | 2009-11-25 | |||
| KR20190000477A | 2019-01-03 | |||
| KR101417772B1 | 2014-07-15 | |||
| KR20120047879A | 2012-05-14 | |||
| KR20070118376A | 2007-12-17 |
Attorney, Agent or Firm:
B&IP-JOOWON PATENT AND LAW FIRM (KR)
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