Title:
PROBING DEVICE
Document Type and Number:
WIPO Patent Application WO/2006/001108
Kind Code:
A1
Abstract:
A probing device which applies, while causing a cantilever (10) provided with (a probe (10a)) disposed opposite to the surface of a sample (20) to perform self-excited oscillation at a predetermined frequency, excitation light intermittently to the sample (20) to observe the sample (20), wherein the excitation light is applied to the sample (20) at a predetermined timing when the distance between the probe (10a) and the sample (20) is not greater than a predetermined distance.
Inventors:
MATSUMOTO TAKUYA (JP)
KAWAI TOMOJI (JP)
KAWAI TOMOJI (JP)
Application Number:
PCT/JP2005/005583
Publication Date:
January 05, 2006
Filing Date:
March 25, 2005
Export Citation:
Assignee:
JAPAN SCIENCE & TECH AGENCY (JP)
MATSUMOTO TAKUYA (JP)
KAWAI TOMOJI (JP)
MATSUMOTO TAKUYA (JP)
KAWAI TOMOJI (JP)
International Classes:
G01Q60/24; G01Q60/32; G01Q80/00; (IPC1-7): G01N13/16
Foreign References:
| JPH07260808A | 1995-10-13 | |||
| JPH10260190A | 1998-09-29 | |||
| JP2000081382A | 2000-03-21 |
Attorney, Agent or Firm:
Suzuye, Takehiko c/o SUZUYE & SUZUYE (1-12-9 Toranomo, Minato-ku Tokyo 01, JP)
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