Title:
PROCESSING SYSTEM AND MEASUREMENT MEMBER
Document Type and Number:
WIPO Patent Application WO/2021/210104
Kind Code:
A1
Abstract:
A processing system which processes an object by irradiating the object with an energy beam is provided with: a placement device on which the object is placed; an irradiation device for irradiating the object with the energy beam; and a light reception device having a beam passage member having an attenuation area in which the energy beam is attenuated and a plurality of passage areas through which the energy beam is passed, and a light reception unit for receiving the energy beam which has passed through the plurality of passage areas.
More Like This:
| JPH0292481 | DRILLING AND CUTTING METHOD AND CUTTING DEVICE |
| JPH01204407 | TRIMMING OF PLANAR CAPACITOR |
| JP5989422 | Manufacturing method of semiconductor device |
Inventors:
EGAMI SHIGEKI (JP)
TATSUZAKI YOSUKE (JP)
TATSUZAKI YOSUKE (JP)
Application Number:
PCT/JP2020/016604
Publication Date:
October 21, 2021
Filing Date:
April 15, 2020
Export Citation:
Assignee:
NIKON CORP (JP)
International Classes:
B23K26/00
Foreign References:
| JPH03184742A | 1991-08-12 | |||
| JP2006289443A | 2006-10-26 | |||
| JPH07239210A | 1995-09-12 | |||
| JP2001319871A | 2001-11-16 | |||
| JP2008119716A | 2008-05-29 | |||
| US20140132751A1 | 2014-05-15 | |||
| US20020017509A1 | 2002-02-14 | |||
| US20170044002A1 | 2017-02-16 |
Other References:
See also references of EP 4137261A4
Attorney, Agent or Firm:
EGAMI, Tatsuo (JP)
Download PDF: