Title:
PULSE SYSTEM VERIFICATION
Document Type and Number:
WIPO Patent Application WO/2020/033016
Kind Code:
A3
Abstract:
A system for verifying the operation of RF generators and resulting pulse waveforms in semiconductor processes includes a process chamber, a profile sensor, an optical sensor and a controller. A process implemented by the controller of the system for verifying the operation of RF generators and resulting pulse waveforms in semiconductor processes includes generating a pulse profile of a pulse shape of an RF generator under test, selecting a stored, representative profile of an RF generator known to be operating correctly to compare to the profile generated for the RF generator for a same pulse mode, defining a quantitative metric/control limit to identify similarities and/or differences between pulses of same pulse modes between the generated profile of the RF generator and the stored profile, comparing the generated profile and the selected stored profile, and determining if the RF generator under test is operating properly based on the comparison.
Inventors:
GHANTASALA SATHYENDRA (US)
DOH HYUN-HO (US)
DOH HYUN-HO (US)
Application Number:
PCT/US2019/024532
Publication Date:
April 16, 2020
Filing Date:
March 28, 2019
Export Citation:
Assignee:
APPLIED MATERIALS INC (US)
International Classes:
G01R31/28; G01R19/00; H01L21/3065; H04B17/10
Foreign References:
| US20150382442A1 | 2015-12-31 | |||
| US20090132189A1 | 2009-05-21 | |||
| US20150241272A1 | 2015-08-27 | |||
| US20160268100A1 | 2016-09-15 | |||
| KR100757347B1 | 2007-09-10 |
Attorney, Agent or Firm:
VILLABON, Jorge Tony et al. (US)
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