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Title:
PULSED LIGHT GENERATION DEVICE, PULSED LIGHT GENERATION METHOD, EXPOSURE DEVICE COMPRISING PULSED LIGHT GENERATION DEVICE, AND INSPECTION DEVICE
Document Type and Number:
WIPO Patent Application WO/2017/204113
Kind Code:
A1
Abstract:
[Problem] To be capable of generating two types of pulsed light having mutually different temporal intensity waveforms, by using a simple configuration. [Solution] A pulsed light generation device comprising: an optical coupler comprising at least four I/O ports including a first port, a second port, a third port, and a fourth port; a connecting optical path that connects the third port and the fourth port; and a phase modulation element arranged in the connecting optical path. The optical coupler branches the input pulsed light input to the first port and outputs same as first direction pulsed light and second direction pulsed light to the third and fourth ports, respectively. The phase modulation element outputs output pulsed light having mutually different waveforms, from the first and second ports respectively, by applying phase modulation to at least either the first direction pulsed light or the second direction pulsed light.

Inventors:
TOKUHISA AKIRA (JP)
Application Number:
PCT/JP2017/018853
Publication Date:
November 30, 2017
Filing Date:
May 19, 2017
Export Citation:
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Assignee:
NIPPON KOGAKU KK (JP)
International Classes:
G02F1/01; G01N21/956; G02F1/37; G03F1/84; G03F7/20; H01S3/00; H01S3/10
Domestic Patent References:
WO2002095486A12002-11-28
Foreign References:
US20080024787A12008-01-31
JPH05224249A1993-09-03
JP2000081644A2000-03-21
JP2005173530A2005-06-30
Attorney, Agent or Firm:
NAGAI, Fuyuki et al. (JP)
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