Title:
QUALITY CONTROL SYSTEM FOR GRINDING DEVICE, AND QUALITY CONTROL METHOD FOR GRINDING DEVICE
Document Type and Number:
WIPO Patent Application WO/2020/188624
Kind Code:
A1
Abstract:
This quality control method for a grinding device includes: preparing a grinding device (11) and a communication terminal (30) capable of performing data communication with a communication unit (31) of the grinding device; providing a plurality of sensors (40) in the grinding device; connecting the plurality of sensors respectively to a plurality of sensor information input ports (41) of the grinding device; operating the grinding device; acquiring sensor information, obtained from the sensor information input ports, by means of an information acquiring unit (12) provided in the grinding device; on the basis of the sensor information acquired by the information acquiring unit, performing a conversion, by means of a computing unit (15) provided in the grinding device, to obtain the minimum amount of analysis data required for a graph display indicating a change in processing information under certain conditions; and selecting analysis data to be displayed, from among the analysis data obtained from the sensor information from the plurality of sensors, and displaying the same as a graph on a display unit (33) of the communication terminal.
More Like This:
| JP2022008199 | CMP POLISHING PAD WITH UNIFORM WINDOW |
| JP2004261955 | LAPPING DEVICE AND LAPPING METHOD |
| JP2022041491 | WAFER GRINDING METHOD |
Inventors:
HORIE MASANORI (JP)
MIYAHARA KAZUHIKO (JP)
SAKATANI KENJI (JP)
FUKUMAN MASARU (JP)
MIYAHARA KAZUHIKO (JP)
SAKATANI KENJI (JP)
FUKUMAN MASARU (JP)
Application Number:
PCT/JP2019/010809
Publication Date:
September 24, 2020
Filing Date:
March 15, 2019
Export Citation:
Assignee:
TOYO ADVANCED TECH CO LTD (JP)
International Classes:
B24B49/10; B23Q17/00; G01M99/00; G05B19/4063; G07C3/14
Domestic Patent References:
| WO2015097828A1 | 2015-07-02 |
Foreign References:
| JP2018034297A | 2018-03-08 | |||
| JP2004268234A | 2004-09-30 | |||
| JPH06262490A | 1994-09-20 | |||
| JP2000141167A | 2000-05-23 | |||
| JP2004268224A | 2004-09-30 | |||
| EP0893747A2 | 1999-01-27 | |||
| JP2007118094A | 2007-05-17 | |||
| JP2019053699A | 2019-04-04 |
Attorney, Agent or Firm:
MAEDA & PARTNERS (JP)
Download PDF: