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Patent Searching and Data


Title:
RAW MATERIAL SUPPLY APPARATUS AND RAW MATERIAL SUPPLY METHOD
Document Type and Number:
WIPO Patent Application WO/2021/060083
Kind Code:
A1
Abstract:
A raw material supply apparatus according to an embodiment of the present disclosure comprises: a container which stores a solution obtained by dissolving a first solid raw material in a solvent or a dispersion system obtained by dispersing the first solid raw material in a dispersion medium; an injection part which sprays the solution or the dispersion system to be injected into the container; an exhaust port which exhausts the inside of the container; a heating part which heats a second solid raw material formed by removing the solvent or the dispersion medium from the solution or the dispersion system; a deposition part which is disposed between the injection part and the exhaust port in the container and deposits the second solid raw material.

Inventors:
OKABE TSUNEYUKI (JP)
KOMORI EIICHI (JP)
Application Number:
PCT/JP2020/034970
Publication Date:
April 01, 2021
Filing Date:
September 15, 2020
Export Citation:
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Assignee:
TOKYO ELECTRON LTD (JP)
International Classes:
C23C16/448; H01L21/31
Foreign References:
JP2004115831A2004-04-15
JP2005256107A2005-09-22
JP2008538158A2008-10-09
JP2008522029A2008-06-26
JP2008038211A2008-02-21
Attorney, Agent or Firm:
ITOH, Tadashige et al. (JP)
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