Title:
RECESSED STRUCTURE CAPABLE OF BEING CONVENIENTLY MONITORED ONLINE, AND MANUFACTURING METHOD THEREOF
Document Type and Number:
WIPO Patent Application WO/2021/068388
Kind Code:
A1
Abstract:
A recessed structure capable of being conveniently monitored online comprises a medium layer I, and a medium layer II positioned above the medium layer I. The medium layer I comprises a metal through hole, and a metal contact layer positioned above the metal through hole. The medium layer II comprises a conical recess positioned above the metal contact layer. The conical recess has inclined sidewalls. The horizontal cross section area of the conical recess gradually increases in a direction away from the metal contact layer. A reflective film covers the inclined sidewall. The recessed structure capable of being conveniently monitored online and the manufacturing method thereof enable quick identification of defects in a recessed structure by means of alternating bright and dark annular images formed by a monitoring system.
Inventors:
KANG XIAOXU (CN)
Application Number:
PCT/CN2019/122972
Publication Date:
April 15, 2021
Filing Date:
December 04, 2019
Export Citation:
Assignee:
SHANGHAI IC R & D CENTER CO LTD (CN)
International Classes:
H01L23/544
Foreign References:
| CN110207818A | 2019-09-06 | |||
| CN208738213U | 2019-04-12 | |||
| CN110120437A | 2019-08-13 | |||
| CN106568779A | 2017-04-19 | |||
| CN105849643A | 2016-08-10 | |||
| JP2017212318A | 2017-11-30 |
Attorney, Agent or Firm:
SHANGHAI TIANCHEN INTELLECTUAL PROPERTY AGENCY (CN)
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