Title:
RESISTANCE ELEMENT AND ELECTRONIC DEVICE
Document Type and Number:
WIPO Patent Application WO/2021/084841
Kind Code:
A1
Abstract:
A resistance element includes a resistive film, in which the resistive film is adjacent to a protrusion formed on a surface of a semiconductor substrate, the protrusion including a step traversed by the resistive film.
Inventors:
TOMITA CHIHIRO (JP)
HIRAI TOMOHIRO (JP)
HIRAI TOMOHIRO (JP)
Application Number:
PCT/JP2020/030440
Publication Date:
May 06, 2021
Filing Date:
August 07, 2020
Export Citation:
Assignee:
SONY SEMICONDUCTOR SOLUTIONS CORP (JP)
International Classes:
H01L49/02; H01L27/06
Foreign References:
US9478625B1 | 2016-10-25 | |||
US20140084381A1 | 2014-03-27 | |||
EP2590221A1 | 2013-05-08 | |||
US20150333057A1 | 2015-11-19 | |||
US20150311272A1 | 2015-10-29 | |||
US20150061076A1 | 2015-03-05 | |||
JPH11330375A | 1999-11-30 |
Attorney, Agent or Firm:
MATSUO Kenichiro (JP)
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