Title:
RESONATOR AND FORMING METHOD THEREFOR
Document Type and Number:
WIPO Patent Application WO/2021/135101
Kind Code:
A1
Abstract:
Provided are a resonator and a forming method therefor. The forming method for the resonator comprises: forming a piezoelectric stacking structure (130) on a first substrate (100), comprising a working region (100s), and a surface of the piezoelectric stacking structure (130) in contact with the first substrate (100) being a first front surface (130a); forming a sacrificial layer (140) on the working region (100s) to cover the piezoelectric stacking structure (130); providing a second substrate (200); forming a bonding layer (210) on the second substrate (200), a surface of the bonding layer (210) in contact with the second substrate (200) being a second front surface (210a), and a surface thereof away from the second front surface (210a) being a second rear surface (210b); attaching the second rear surface (210b) of the bonding layer (210) to the sacrificial layer (140) and the piezoelectric stacking structure (130) exposed by the sacrificial layer (140), so that the bonding layer (210) covers a sidewall of the sacrificial layer (140) and fills between the second substrate (200) and the piezoelectric stacking structure (130); removing the first substrate (100) to expose the first front surface (130a) of the piezoelectric stacking structure (130); forming a release hole (30) penetrating the piezoelectric stacking structure (130) or a release hole (30) penetrating the second substrate (200), and the release hole (30) exposing the sacrificial layer (140); and removing the sacrificial layer (140) through the release hole (30) to form a cavity (40). The method helps to improve the performance of the resonator.
Inventors:
YANG GUOHUANG (CN)
Application Number:
PCT/CN2020/098840
Publication Date:
July 08, 2021
Filing Date:
June 29, 2020
Export Citation:
Assignee:
NINGBO SEMICONDUCTOR INT CORPORATION SHANGHAI BRANCH (CN)
International Classes:
H03H3/02
Foreign References:
| CN110149100A | 2019-08-20 | |||
| CN110149100A | 2019-08-20 | |||
| CN1794572A | 2006-06-28 | |||
| CN109474254A | 2019-03-15 | |||
| CN107706118A | 2018-02-16 | |||
| CN110289825A | 2019-09-27 | |||
| JP2007036914A | 2007-02-08 |
Attorney, Agent or Firm:
INTEBRIGHT LLP (CN)
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