Title:
RETAINING RING WITH SLURRY TRANSPORT GROOVES
Document Type and Number:
WIPO Patent Application WO2005058545
Kind Code:
B1
Abstract:
A retaining ring for chemical mechanical polishing has a generally annular body with a top surface, a bottom surface, an inner diameter surface, and an outer diameter surface. The bottom surface includes a plurality of channels, each channel extending from the inner diameter surface to the outer diameter surface and having a rounded ceiling.
Inventors:
CHEN HUNG CHIH (US)
ZUNIGA STEVEN M (US)
ZUNIGA STEVEN M (US)
Application Number:
PCT/US2004/041322
Publication Date:
July 28, 2005
Filing Date:
December 08, 2004
Export Citation:
Assignee:
APPLIED MATERIALS INC (US)
CHEN HUNG CHIH (US)
ZUNIGA STEVEN M (US)
CHEN HUNG CHIH (US)
ZUNIGA STEVEN M (US)
International Classes:
B24B37/04; B24B41/06; (IPC1-7): B24B37/04
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