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Title:
RIGID-FLEXIBLE COUPLING ULTRAPRECISION DUAL-SHAFT ROTARY TABLE
Document Type and Number:
WIPO Patent Application WO/2022/088784
Kind Code:
A1
Abstract:
A rigid-flexible coupling ultraprecision dual-shaft rotary table, comprising a first rigid-flexible coupling rotary platform (1), a second rigid-flexible coupling rotary platform (2), a third rigid-flexible coupling shaft (3), and a carrier platform (4) that are connected by means of a U-shaped connecting rack or a Y-shaped connecting rack. The first rigid-flexible coupling rotary platform (1) comprises a first support (101), a first rotating shaft (102), first flexible hinges (103), and a first workbench (104); the second rigid-flexible coupling rotary platform (2) comprises a second support (201), a second rotating shaft (202), second flexible hinges (203), and a second workbench (204); and the third rigid-flexible coupling shaft (3) comprises a third support (301), a third rotating shaft (302), third flexible hinges (303), and a third workbench (304). By integrally designing the first flexible hinges, the second flexible hinges, the third flexible hinges, and the first rigid-flexible coupling rotary platform, the second rigid-flexible coupling rotary platform, and the third rigid-flexible coupling shaft that are used as rotary components, core rotary components themselves have flexible hinge piece structures, and the elastic deformation of the flexible hinges is used to compensate for rotation, thereby reducing the influence of "creeping" caused by the change of a friction force in the process of the starting, stopping, and micro-rotating of the dual-shaft rotary table on rotation and angle positioning precision.

Inventors:
YANG ZHIJUN (CN)
HUANG JIANBIN (CN)
WEI YUTAI (CN)
Application Number:
PCT/CN2021/108025
Publication Date:
May 05, 2022
Filing Date:
July 23, 2021
Export Citation:
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Assignee:
FOSHAN HUADAO SUPER PRECISION TECH CO LTD (CN)
International Classes:
F16M11/20
Foreign References:
CN110928238A2020-03-27
CN112483832A2021-03-12
CN106002312A2016-10-12
CN111324152A2020-06-23
CN110561478A2019-12-13
CN110202563A2019-09-06
KR101965072B12019-04-02
JP2009202236A2009-09-10
Attorney, Agent or Firm:
SHENZHEN WINSTON PATENT ATTORNEYS (CN)
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