Title:
SAMPLE HOLDER AND X-RAY PHOTOELECTRON SPECTROSCOPE
Document Type and Number:
WIPO Patent Application WO/2020/250307
Kind Code:
A1
Abstract:
This sample holder (30) comprises: a sample mount (34), a secondary electron generation plate (31), and a movement mechanism (33). The irradiation of X-rays (14) onto the secondary electron generation plate (31) causes the same to emit secondary electrons (38). The movement mechanism (33) moves the secondary electron generation plate (31) in relation to the sample mount (34). The secondary electron generation plate (31) or movement mechanism (33) is configured such that the distance between a first primary surface (34a) of the sample mount (34) and a part (32) of the secondary electron generation plate (31) positioned on the path of X-rays (14) irradiated onto a sample (20) changes as the secondary electron generation plate (31) moves.
Inventors:
IMAZAWA TAKASHI (JP)
KAWASE KAZUMASA (JP)
TANAKA MASAYUKI (JP)
KAWASE KAZUMASA (JP)
TANAKA MASAYUKI (JP)
Application Number:
PCT/JP2019/023140
Publication Date:
December 17, 2020
Filing Date:
June 11, 2019
Export Citation:
Assignee:
MITSUBISHI ELECTRIC CORP (JP)
International Classes:
G01N23/20025; G01N23/2273
Foreign References:
| JPH03176957A | 1991-07-31 | |||
| JP2000266707A | 2000-09-29 | |||
| JPH09243579A | 1997-09-19 | |||
| JP2015088485A | 2015-05-07 | |||
| JP2016212076A | 2016-12-15 | |||
| JP2015511055A | 2015-04-13 | |||
| JP2019002750A | 2019-01-10 | |||
| JPH07220670A | 1995-08-18 |
Attorney, Agent or Firm:
FUKAMI PATENT OFFICE, P.C. (JP)
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